The instrument consists of vacuum system, microwave excitation system, air supply system, circulating water cooling system, and etc.

Experimental contents
☆To prepare various multi-functional film materials by HFPCVD method;
☆To prepare single-walled carbon nanotube by floating catalyst method;
☆To prepare one-dimensional nanometer structure;
☆MWP chemical synthesis.

Configuration and technical parameters

☆Power of microwave source: 0~900W, continuously adjustable output.
☆Vacuum system: mechanical vacuum pump, AC electric supply: 220V, pumping speed: 4L/s, ultimate air pressure: ≤0.6Pa;
☆Stainless steel cold trap, high-volume butterfly valve, GI-40 high-volume butterfly valve.
☆Vacuum measurement: two-way thermocouple gauge, one-way ionization gauge: 1.0x10³Pa~1.0x10^-5Pa.
☆Reaction chamber is manufactured with quartz glass, diameter: Φ44mm: ultimate vacuum, 6×10-¹P.